NiCo 마이크로 범프 구현의 건
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메디션 대표이사 정일민입니다.
폐사는 반도체 Test contactor 를 제조하는 회사로 NiCo 범프 구현이 가능하신지 문의 차 연락 드렸습니다.
1. 마이크로 범프(돔/피라미드) 전기도금 방식
1) 방식 : 포토레지스트로 마이크로 홀(또는 패턴)을 구현 -> Cu패드 위에 포토레지스트(PR)를 얇게 도포 -> 노광/현상으로 미세구멍 패턴을 구현 -> 구멍크기(직경 5~20um, 깊이 5~15um), 구멍 모양(원형 또는 피라미드형범프) -> 전기도금으로 NiCo 범프 키우기, Co함량은 12~15wt%(범프직경 5~10um, 범프높이 4~6um, 범프개수 패드당 4~9개, 다이아몬드배열) -> Au(0.05~0.1um) 마감도금
2. 추가로 NiCo 범프 위에 Rh 스킨 코팅 또는 Ru(루테늄) 스킨 도금 (0.03~0.05um) 가능한지 여부
검토 후 회신 부탁 드리겠습니다.
감사합니다.
정일민배상,.
010-4312-3405
imjeong@medission.co.kr
메디션 대표이사 정일민입니다.
폐사는 반도체 Test contactor 를 제조하는 회사로 NiCo 범프 구현이 가능하신지 문의 차 연락 드렸습니다.
1. 마이크로 범프(돔/피라미드) 전기도금 방식
1) 방식 : 포토레지스트로 마이크로 홀(또는 패턴)을 구현 -> Cu패드 위에 포토레지스트(PR)를 얇게 도포 -> 노광/현상으로 미세구멍 패턴을 구현 -> 구멍크기(직경 5~20um, 깊이 5~15um), 구멍 모양(원형 또는 피라미드형범프) -> 전기도금으로 NiCo 범프 키우기, Co함량은 12~15wt%(범프직경 5~10um, 범프높이 4~6um, 범프개수 패드당 4~9개, 다이아몬드배열) -> Au(0.05~0.1um) 마감도금
2. 추가로 NiCo 범프 위에 Rh 스킨 코팅 또는 Ru(루테늄) 스킨 도금 (0.03~0.05um) 가능한지 여부
검토 후 회신 부탁 드리겠습니다.
감사합니다.
정일민배상,.
010-4312-3405
imjeong@medission.co.kr

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